VPM-5 SMARTPIRANI™ Wide Range Pirani Transducer

1×10^-6 to 1333 mbar / 7.5×10^-7 to 1000 Torr / 1×10^-4 to 1.333×10⁵  Pa

NEXT GENERATION MEMS PIRANI TRANSDUCER 

• Measurement range of 1×10^-6 to 1333 mbar (7.5×10^-7 to 1000 Torr)
• Ultra-wide range high performance MEMS Pirani sensor
• Advanced innovative digital signal processing  
• Precision gas-independent sensor from 2 to 1333 mbar
• Mountable in any orientation without impact on performance.
• Programmable voltage output signal with other vendor emulation
• Digital RS-232 or RS-485 interface
• Three solid-state set points for vacuum process controlling
• High overpressure tolerance of 10 bar (145 psi)
• Drop-in replacement for MKS 925 MicroPirani™ and 910
• Robust, compact stainless steel flange and enclosure design

PDF Datasheet