VPM-4 SMARTPIRANI™ LT Vacuum Transducer

1×10^-6 to 13 mbar / 7.5×10^-7 to 10 Torr / 1×10^-4 to 1.333×10⁺³  Pa

NEXT GENERATION MEMS PIRANI TRANSDUCER 

• Measurement range of 1×10^-6 to 13.33 mbar (7.5×10^-7 to 10 Torr)
• Ultra-wide range high performance MEMS Pirani sensor
• Advanced innovative digital signal processing  
• Mountable in any orientation without impact on performance.
• Programmable voltage output signal with other vendor emulation
• Digital RS-232 or RS-485 interface
• Low pressure vacuum switch 
• Three solid-state set points for vacuum process controlling
• High overpressure tolerance of 10 bar (145 psi)
• Robust, compact stainless steel flange and enclosure design

PDF Datasheet