Linear translation stage for ultra high vacuum applications. Travel ranges from 100 to 450 mm and can support loads up to 20 kg. 1 µm or 5 µm resolution available. Modular design enables direct compatibility with all VSM23 and VSM17 stages.
Compatible with AML’s vacuum stage mounting brackets. These can be used to create multi-axis mechanisms with VSM stages.
Overview
Standard travels from 100 to 450 mm
5 µm resolution (1 µm for option HR)
Maximum speed 25 mm/s (5 mm/s for option HR)
Suitable for use to 1 x 10-10 mBar
Directly stackable for XYZ orientations with all VSM23 and VSM17 stages
Lightweight design using UHV-prepared aluminium construction as standard
Limit switches and encoder options available
Stainless steel construction available (option SS)
