Linear – VSM17 X

High Performance, Modular UHV Compatible Stage.
Linear translation stage suitable for use in UHV. Can support centred loads of up to 50 kilograms and travel from 50 to 200 mm. 5 µm resolution allows for precise in-vacuum motion.

Overview

  • Standard travels from 50 to 200 mm
  • 5 µm resolution (1 µm for option HR)
  • Traverses from 5 to 15 mm/sec
  • Directly stackable for XYZ orientations
  • Suitable for use to 1 x 10-10 mBar
  • UHV-prepared aluminium construction as standard
  • Stainless steel construction available (option SS)
  • Bakeable to 150°C (200°C for option SS)

 

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