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Linear – VSM17 X
High Performance, Modular UHV Compatible Stage.
Linear translation stage suitable for use in UHV. Can support centred loads of up to 50 kilograms and travel from 50 to 200 mm. 5 µm resolution allows for precise in-vacuum motion.
Overview
- Standard travels from 50 to 200 mm
- 5 µm resolution (1 µm for option HR)
- Traverses from 5 to 15 mm/sec
- Directly stackable for XYZ orientations
- Suitable for use to 1 x 10-10 mBar
- UHV-prepared aluminium construction as standard
- Stainless steel construction available (option SS)
- Bakeable to 150°C (200°C for option SS)