Linear – VSM17 X

High Performance, Modular UHV Compatible Stage.
Linear translation stage suitable for use in UHV. Can support centred loads of up to 50 kilograms and travel from 50 to 200 mm. 5 µm resolution allows for precise in-vacuum motion.

Overview

• Standard travels from 50 to 200 mm
• 5 µm resolution (1 µm for option HR)
• Traverses from 5 to 15 mm/sec
• Directly stackable for XYZ orientations
• Suitable for use to 1 x 10^-10 mBar
• UHV-prepared aluminium construction as standard
• Stainless steel construction available (option SS)
• Bakeable to 150°C (200°C for option SS)