VPM-15 TriCAP™ Wide Range Multi-Sensor Vacuum Transducer

1×10^-6 to 1333 mbar / 7.5×10^-7 to 1000 Torr / 1×10^-4 to 1.333×10⁵  Pa

CAPACITANCE DIAPHRAGM, MEMS PIRANI, PIEZO TRANSDUCER 

• Measurement range from 1×10^-6 to 1333 mbar (7.5×10^-7 to 1000 Torr)
• Gas-independent sensor from 5×10^-3 to 1333 mbar
• Ultra-wide range high performance MEMS Pirani sensor
• Robust ceramic capacitance diaphragm gauge   
• Mountable in any orientation without impact on performance.
• Programmable voltage output signal with other vendor emulation
• Digital RS-232 or RS-485 interface
• Three solid-state setpoints for vacuum process controlling
• Drop-in replacement for MKS 925 MicroPirani™ and 910
• Compact multi-sensor solutions

PDF Datasheet