VSM23-X

Linear translation stage for ultra high vacuum applications. Travel ranges from 100 to 450 mm and can support loads up to 20 kg. 1 µm or 5 µm resolution available. Modular design enables direct compatibility with all VSM23 and VSM17 stages.

Compatible with AML’s vacuum stage mounting brackets. These can be used to create multi-axis mechanisms with VSM stages.

Overview

• Standard travels from 100 to 450 mm
• 5 µm resolution (1 µm for option HR)
• Maximum speed 25 mm/s (5 mm/s for option HR)
• Suitable for use to 1 x 10^-10 mBar
• Directly stackable for XYZ orientations with all VSM23 and VSM17 stages
• Lightweight design using UHV-prepared aluminium construction as standard
• Limit switches and encoder options available
• Stainless steel construction available (option SS)
• Bakeable to 150°C (200°C for option SS)